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1 Ergebnisse
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Microroughness Reduction of Tungsten Films by Laser Polishi..:
Kim, Yong-Gi
;
Ryu, Je-Kil
;
Kim, Dae-Jin
...
Japanese Journal of Applied Physics. 43 (2004) 4R - p. 1315 , 2004
Link:
https://doi.org/10.1143/jjap.43.1315
RT Journal T1 <Title>Microroughness Reduction of Tungsten Films by Laser Polishing Technology with a Line Beam</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.43.1315&Exemplar=1&LAN=DE A1 Kim, Yong-Gi A1 Ryu, Je-Kil A1 Kim, Dae-Jin A1 Kim, Hyun-Jung A1 Lee, Sungman A1 Cha, Byung Heon A1 Cha, Hyungki A1 Kim, Cheol-Jung PB IOP Publishing YR 2004 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 43 IS 4R SP 1315 LK http://dx.doi.org/https://doi.org/10.1143/jjap.43.1315 DO https://doi.org/10.1143/jjap.43.1315 SF ELIB - SuUB Bremen
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