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1 Ergebnisse
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Abnormal Oxidation of Nickel Silicide on N-Type Substrate a..:
Yun, Jang-Gn
;
Oh, Soon-Young
;
Ji, Hee-Hwan
...
Japanese Journal of Applied Physics. 43 (2004) 10 - p. 6998-6999 , 2004
Link:
https://doi.org/10.1143/jjap.43.6998
RT Journal T1
Abnormal Oxidation of Nickel Silicide on N-Type Substrate and Effect of Preamorphization Implantation
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.43.6998&Exemplar=1&LAN=DE A1 Yun, Jang-Gn A1 Oh, Soon-Young A1 Ji, Hee-Hwan A1 Huang, Bin-Feng A1 Park, Young-Ho A1 Wang, Jin-Suk A1 Park, Seong-Hyung A1 Bae, Tae-Sung A1 Lee, Hi-Deok PB IOP Publishing YR 2004 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 43 IS 10 SP 6998 OP 6999 LK http://dx.doi.org/https://doi.org/10.1143/jjap.43.6998 DO https://doi.org/10.1143/jjap.43.6998 SF ELIB - SuUB Bremen
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