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The Impact of Lens Distortion on Dynamic Imaging in Photoli..:
Henke, Wolfgang
Japanese Journal of Applied Physics. 43 (2004) 12 - p. 8013-8018 , 2004
Link:
https://doi.org/10.1143/jjap.43.8013
RT Journal T1 <Title>The Impact of Lens Distortion on Dynamic Imaging in Photolithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.43.8013&Exemplar=1&LAN=DE A1 Henke, Wolfgang PB IOP Publishing YR 2004 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 43 IS 12 SP 8013 OP 8018 LK http://dx.doi.org/https://doi.org/10.1143/jjap.43.8013 DO https://doi.org/10.1143/jjap.43.8013 SF ELIB - SuUB Bremen
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