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1 Ergebnisse
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Effects of Grain Size and Abrasive Size of Polycrystalline ..:
Kang, Hyun-Goo
;
Katoh, Takeo
;
Kim, Sung-Jun
...
Japanese Journal of Applied Physics. 43 (2004) 3A - p. L365-L368 , 2004
Link:
https://doi.org/10.1143/jjap.43.l365
RT Journal T1 <Title>Effects of Grain Size and Abrasive Size of Polycrystalline Nano-particle Ceria Slurry on Shallow Trench Isolation Chemical Mechanical Polishing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.43.l365&Exemplar=1&LAN=DE A1 Kang, Hyun-Goo A1 Katoh, Takeo A1 Kim, Sung-Jun A1 Paik, Ungyu A1 Park, Hyung-Soon A1 Park, Jea-Gun PB IOP Publishing YR 2004 SN 0021-4922 JF Japanese Journal of Applied Physics VO 43 IS 3A SP L365 OP L368 LK http://dx.doi.org/https://doi.org/10.1143/jjap.43.l365 DO https://doi.org/10.1143/jjap.43.l365 SF ELIB - SuUB Bremen
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