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1 Ergebnisse
1
Dependence of Analog and Digital Performances on Mechanical..:
Ji, Hee-Hwan
;
Park, Sung-Hyung
;
Kim, Yong-Goo
...
Japanese Journal of Applied Physics. 44 (2005) 4S - p. 2171 , 2005
Link:
https://doi.org/10.1143/jjap.44.2171
RT Journal T1
Dependence of Analog and Digital Performances on Mechanical Film Stress of ILD Layers in Nanoscale CMOSFETs
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.44.2171&Exemplar=1&LAN=DE A1 Ji, Hee-Hwan A1 Park, Sung-Hyung A1 Kim, Yong-Goo A1 Wang, Jin-Suk A1 Lee, Hi-Deok A1 Baek, Seong-Hak A1 Kim, Kyoung-Cheol A1 Song, Byeung-Soo A1 Bae, Hui-Kyoung A1 Lee, Heui-Seung A1 Kang, Young-Seok A1 Kim, Dae-Byung A1 Park, Jin-Won PB IOP Publishing YR 2005 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 44 IS 4S SP 2171 LK http://dx.doi.org/https://doi.org/10.1143/jjap.44.2171 DO https://doi.org/10.1143/jjap.44.2171 SF ELIB - SuUB Bremen
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