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1 Ergebnisse
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Variable Optimization for Chemical Mechanical Polishing:
Liao, Shan-Hui
;
Fu, Ming-Nan
;
Hou, Kung-Hsu
.
Japanese Journal of Applied Physics. 44 (2005) 5R - p. 2961 , 2005
Link:
https://doi.org/10.1143/jjap.44.2961
RT Journal T1 <Title>Variable Optimization for Chemical Mechanical Polishing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.44.2961&Exemplar=1&LAN=DE A1 Liao, Shan-Hui A1 Fu, Ming-Nan A1 Hou, Kung-Hsu A1 Li, Ching-Chung PB IOP Publishing YR 2005 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 44 IS 5R SP 2961 LK http://dx.doi.org/https://doi.org/10.1143/jjap.44.2961 DO https://doi.org/10.1143/jjap.44.2961 SF ELIB - SuUB Bremen
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