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1 Ergebnisse
1
Effect of Fluorine on Characteristics of Shallow Trench Iso..:
Chung, Sung-Woong
;
Chung, Chai-O
;
Lee, Sang-Don
...
Japanese Journal of Applied Physics. 45 (2006) 3R - p. 1575 , 2006
Link:
https://doi.org/10.1143/jjap.45.1575
RT Journal T1
Effect of Fluorine on Characteristics of Shallow Trench Isolation Prepared Using High-Density Plasma Chemical Vapor Deposition Including NF3 Chemistry
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.45.1575&Exemplar=1&LAN=DE A1 Chung, Sung-Woong A1 Chung, Chai-O A1 Lee, Sang-Don A1 Sohn, Hyun-Chul A1 Kwon, Ho-Yup A1 Hong, Sung-Ju PB IOP Publishing YR 2006 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 45 IS 3R SP 1575 LK http://dx.doi.org/https://doi.org/10.1143/jjap.45.1575 DO https://doi.org/10.1143/jjap.45.1575 SF ELIB - SuUB Bremen
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