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1 Ergebnisse
1
Effects of Antenna Size and Configurations in Large-Area RF..:
Deguchi, Hiroshige
;
Yoneda, Hitoshi
;
Kato, Kenji
...
Japanese Journal of Applied Physics. 45 (2006) 10S - p. 8042 , 2006
Link:
https://doi.org/10.1143/jjap.45.8042
RT Journal T1
Effects of Antenna Size and Configurations in Large-Area RF Plasma Production with Internal Low-Inductance Antenna Units
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.45.8042&Exemplar=1&LAN=DE A1 Deguchi, Hiroshige A1 Yoneda, Hitoshi A1 Kato, Kenji A1 Kubota, Kiyoshi A1 Hayashi, Tsukasa A1 Ogata, Kiyoshi A1 Ebe, Akinori A1 Takenaka, Kosuke A1 Setsuhara, Yuichi PB IOP Publishing YR 2006 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 45 IS 10S SP 8042 LK http://dx.doi.org/https://doi.org/10.1143/jjap.45.8042 DO https://doi.org/10.1143/jjap.45.8042 SF ELIB - SuUB Bremen
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