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1 Ergebnisse
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Dry Etching of Ge2Sb2Te5 Thin Films into Nanosized Patterns..:
Yoon, Sung-Min
;
Choi, Kyu-Jeong
;
Park, Young-Sam
...
Japanese Journal of Applied Physics. 45 (2006) 10L - p. L1080 , 2006
Link:
https://doi.org/10.1143/jjap.45.l1080
RT Journal T1
Dry Etching of Ge2Sb2Te5 Thin Films into Nanosized Patterns Using TiN Hard Mask
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.45.l1080&Exemplar=1&LAN=DE A1 Yoon, Sung-Min A1 Choi, Kyu-Jeong A1 Park, Young-Sam A1 Lee, Seung-Yun A1 Lee, Nam-Yeal A1 Yu, Byoung-Gon PB IOP Publishing YR 2006 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 45 IS 10L SP L1080 LK http://dx.doi.org/https://doi.org/10.1143/jjap.45.l1080 DO https://doi.org/10.1143/jjap.45.l1080 SF ELIB - SuUB Bremen
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