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1 Ergebnisse
1
Selectively Formed Metal Organic Chemical Vapor Deposition ..:
Joo, Sung Joong
;
Lee, Han Choon
;
Baek, In Cheol
...
Japanese Journal of Applied Physics. 46 (2007) 4S - p. 1947 , 2007
Link:
https://doi.org/10.1143/jjap.46.1947
RT Journal T1
Selectively Formed Metal Organic Chemical Vapor Deposition TiSiN and Ta Barrier Metal Using Direct Contact Via Process for Sub-65 nm Interconnects
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.46.1947&Exemplar=1&LAN=DE A1 Joo, Sung Joong A1 Lee, Han Choon A1 Baek, In Cheol A1 Shim, Cheonman A1 Hong, Ji Ho A1 Han, Jae Won A1 Kim, Kee Ho A1 Kim, Youngmin PB IOP Publishing YR 2007 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 46 IS 4S SP 1947 LK http://dx.doi.org/https://doi.org/10.1143/jjap.46.1947 DO https://doi.org/10.1143/jjap.46.1947 SF ELIB - SuUB Bremen
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