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1 Ergebnisse
1
Lateral Diffusion of Phosphorous Induced by Excimer Laser I..:
Han, Sang-Myeon
;
Park, Sang-Geun
;
Seong, Seung-Yeon
..
Japanese Journal of Applied Physics. 46 (2007) 10R - p. 6525 , 2007
Link:
https://doi.org/10.1143/jjap.46.6525
RT Journal T1
Lateral Diffusion of Phosphorous Induced by Excimer Laser Irradiation of Silicon Thin Film for Formation of Gradual Lightly Doped Region in Polycrystalline Silicon Thin Film Transistors
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.46.6525&Exemplar=1&LAN=DE A1 Han, Sang-Myeon A1 Park, Sang-Geun A1 Seong, Seung-Yeon A1 Kang, Chi-Jung A1 Han, Min-Koo PB IOP Publishing YR 2007 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 46 IS 10R SP 6525 LK http://dx.doi.org/https://doi.org/10.1143/jjap.46.6525 DO https://doi.org/10.1143/jjap.46.6525 SF ELIB - SuUB Bremen
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