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1 Ergebnisse
1
Atomic Hydrogen Cleaning of Surface Ru Oxide Formed by Extr..:
Oizumi, Hiroaki
;
Izumi, Akira
;
Motai, Kumi
..
Japanese Journal of Applied Physics. 46 (2007) 7L - p. L633 , 2007
Link:
https://doi.org/10.1143/jjap.46.l633
RT Journal T1
Atomic Hydrogen Cleaning of Surface Ru Oxide Formed by Extreme Ultraviolet Irradiation of Ru-Capped Multilayer Mirrors in H2O Ambience
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.46.l633&Exemplar=1&LAN=DE A1 Oizumi, Hiroaki A1 Izumi, Akira A1 Motai, Kumi A1 Nishiyama, Iwao A1 Namiki, Akira PB IOP Publishing YR 2007 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 46 IS 7L SP L633 LK http://dx.doi.org/https://doi.org/10.1143/jjap.46.l633 DO https://doi.org/10.1143/jjap.46.l633 SF ELIB - SuUB Bremen
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