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Reaction Mechanism of Extreme Ultraviolet Resists:
Toriumi, Minoru
;
Kaneyama, Koji
;
Itani, Toshiro
Japanese Journal of Applied Physics. 47 (2008) 6S - p. 4918 , 2008
Link:
https://doi.org/10.1143/jjap.47.4918
RT Journal T1 <Title>Reaction Mechanism of Extreme Ultraviolet Resists</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.47.4918&Exemplar=1&LAN=DE A1 Toriumi, Minoru A1 Kaneyama, Koji A1 Itani, Toshiro PB IOP Publishing YR 2008 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 47 IS 6S SP 4918 LK http://dx.doi.org/https://doi.org/10.1143/jjap.47.4918 DO https://doi.org/10.1143/jjap.47.4918 SF ELIB - SuUB Bremen
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