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1 Ergebnisse
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Application of DC Magnetron Sputtering to Deposition of InG..:
Moon, Yeon-Keon
;
Lee, Sih
;
Kim, Do-Hyun
...
Japanese Journal of Applied Physics. 48 (2009) 3R - p. 031301 , 2009
Link:
https://doi.org/10.1143/jjap.48.031301
RT Journal T1 <Title>Application of DC Magnetron Sputtering to Deposition of InGaZnO Films for Thin Film Transistor Devices</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.48.031301&Exemplar=1&LAN=DE A1 Moon, Yeon-Keon A1 Lee, Sih A1 Kim, Do-Hyun A1 Lee, Dong-Hoon A1 Jeong, Chang-Oh A1 Park, Jong-Wan PB IOP Publishing YR 2009 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 48 IS 3R SP 031301 LK http://dx.doi.org/https://doi.org/10.1143/jjap.48.031301 DO https://doi.org/10.1143/jjap.48.031301 SF ELIB - SuUB Bremen
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