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1 Ergebnisse
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Characterization of Low-k/Cu Damascene Structures Using Mon..:
Uedono, Akira
;
Inoue, Naoya
;
Hayashi, Yoshihiro
...
Japanese Journal of Applied Physics. 48 (2009) 12 - p. 120222 , 2009
Link:
https://doi.org/10.1143/jjap.48.120222
RT Journal T1
Characterization of Low-k/Cu Damascene Structures Using Monoenergetic Positron Beams
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.48.120222&Exemplar=1&LAN=DE A1 Uedono, Akira A1 Inoue, Naoya A1 Hayashi, Yoshihiro A1 Eguchi, Kazuhiro A1 Nakamura, Tomoji A1 Hirose, Yukinori A1 Yoshimaru, Masaki A1 Oshima, Nagayasu A1 Ohdaira, Toshiyuki A1 Suzuki, Ryoichi PB IOP Publishing YR 2009 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 48 IS 12 SP 120222 LK http://dx.doi.org/https://doi.org/10.1143/jjap.48.120222 DO https://doi.org/10.1143/jjap.48.120222 SF ELIB - SuUB Bremen
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