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1 Ergebnisse
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Advances in Selective Wet Etching for Nanoscale NiPt Salici..:
Chu, Ming Mao
;
Chou, Jung-Hua
Japanese Journal of Applied Physics. 49 (2010) 6S - p. 06GG16 , 2010
Link:
https://doi.org/10.1143/jjap.49.06gg16
RT Journal T1 <Title>Advances in Selective Wet Etching for Nanoscale NiPt Salicide Fabrication</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.49.06gg16&Exemplar=1&LAN=DE A1 Chu, Ming Mao A1 Chou, Jung-Hua PB IOP Publishing YR 2010 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 49 IS 6S SP 06GG16 LK http://dx.doi.org/https://doi.org/10.1143/jjap.49.06gg16 DO https://doi.org/10.1143/jjap.49.06gg16 SF ELIB - SuUB Bremen
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