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1 Ergebnisse
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Silicon-Containing Spin-on Underlayer Material for Step and..:
Takei, Satoshi
;
Ogawa, Tsuyoshi
;
Deschner, Ryan
...
Japanese Journal of Applied Physics. 49 (2010) 7R - p. 075201 , 2010
Link:
https://doi.org/10.1143/jjap.49.075201
RT Journal T1
Silicon-Containing Spin-on Underlayer Material for Step and Flash Nanoimprint Lithography
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.49.075201&Exemplar=1&LAN=DE A1 Takei, Satoshi A1 Ogawa, Tsuyoshi A1 Deschner, Ryan A1 Jen, Kane A1 Nihira, Takayasu A1 Hanabata, Makoto A1 Willson, C. Grant PB IOP Publishing YR 2010 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 49 IS 7R SP 075201 LK http://dx.doi.org/https://doi.org/10.1143/jjap.49.075201 DO https://doi.org/10.1143/jjap.49.075201 SF ELIB - SuUB Bremen
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