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1 Ergebnisse
1
Plasma Characteristics of 450 mm Diameter Ferrite-Enhanced ..:
Hong, Seung Pyo
;
Lim, Jong Hyeuk
;
Gweon, Gwang Ho
.
Japanese Journal of Applied Physics. 49 (2010) 8R - p. 080217 , 2010
Link:
https://doi.org/10.1143/jjap.49.080217
RT Journal T1
Plasma Characteristics of 450 mm Diameter Ferrite-Enhanced Inductively Coupled Plasma Source
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.49.080217&Exemplar=1&LAN=DE A1 Hong, Seung Pyo A1 Lim, Jong Hyeuk A1 Gweon, Gwang Ho A1 Yeom, Geun Young PB IOP Publishing YR 2010 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 49 IS 8R SP 080217 LK http://dx.doi.org/https://doi.org/10.1143/jjap.49.080217 DO https://doi.org/10.1143/jjap.49.080217 SF ELIB - SuUB Bremen
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