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1 Ergebnisse
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Effects of Postetching Treatment on Molecular-Pore-Stacking..:
Oshida, Daisuke
;
Kume, Ippei
;
Katsuyama, Hirokazu
...
Japanese Journal of Applied Physics. 50 (2011) 5S1 - p. 05EB04 , 2011
Link:
https://doi.org/10.1143/jjap.50.05eb04
RT Journal T1
Effects of Postetching Treatment on Molecular-Pore-Stacking/Cu Interconnects for 28 nm Node and Beyond
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.50.05eb04&Exemplar=1&LAN=DE A1 Oshida, Daisuke A1 Kume, Ippei A1 Katsuyama, Hirokazu A1 Taiji, Toshiji A1 Maruyama, Takuya A1 Ueki, Makoto A1 Inoue, Naoya A1 Iguchi, Manabu A1 Fujii, Kunihiro A1 Oda, Noriaki A1 Sakurai, Michio PB IOP Publishing YR 2011 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 50 IS 5S1 SP 05EB04 LK http://dx.doi.org/https://doi.org/10.1143/jjap.50.05eb04 DO https://doi.org/10.1143/jjap.50.05eb04 SF ELIB - SuUB Bremen
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