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1 Ergebnisse
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An Autonomously Controllable Plasma Etching System Based on..:
Takahashi, Shunji
;
Kawauchi, Ryota
;
Takashima, Seigo
...
Japanese Journal of Applied Physics. 51 (2012) 7R - p. 076502 , 2012
Link:
https://doi.org/10.1143/jjap.51.076502
RT Journal T1
An Autonomously Controllable Plasma Etching System Based on Radical Monitoring
UL https://suche.suub.uni-bremen.de/peid=cr-10.1143_jjap.51.076502&Exemplar=1&LAN=DE A1 Takahashi, Shunji A1 Kawauchi, Ryota A1 Takashima, Seigo A1 Den, Shoji A1 Katagiri, Toshiro A1 Kano, Hiroyuki A1 Ohta, Takayuki A1 Ito, Masafumi A1 Suzuki, Tatsuya A1 Takeda, Keigo A1 Hori, Masaru PB IOP Publishing YR 2012 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 51 IS 7R SP 076502 LK http://dx.doi.org/https://doi.org/10.1143/jjap.51.076502 DO https://doi.org/10.1143/jjap.51.076502 SF ELIB - SuUB Bremen
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