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1 Ergebnisse
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Application of Inline X-ray Metrology for Defect Characteri..:
Hung, P.Y.
;
Wormington, Matthew
;
Matney, Kevin
...
ECS Transactions. 50 (2013) 6 - p. 341-350 , 2013
Link:
https://doi.org/10.1149/05006.0341ecst
RT Journal T1
Application of Inline X-ray Metrology for Defect Characterization of III-V/Si Heterostructures
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_05006.0341ecst&Exemplar=1&LAN=DE A1 Hung, P.Y. A1 Wormington, Matthew A1 Matney, Kevin A1 Ryan, Paul A1 Dunn, Kathleen A1 Wang, Albert A1 Hill, Richard A1 Wong, Man-Hoi A1 Price, Jimmy A1 Wang, Wei-E A1 Bersuker, Gennadi PB The Electrochemical Society YR 2013 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 50 IS 6 SP 341 OP 350 LK http://dx.doi.org/https://doi.org/10.1149/05006.0341ecst DO https://doi.org/10.1149/05006.0341ecst SF ELIB - SuUB Bremen
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