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1 Ergebnisse
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(Invited) Performance Analysis of a Novel Slurry Injection ..:
Borucki, Leonard
;
Zhuang, Yun
;
Sampurno, Yasa
..
ECS Transactions. 52 (2013) 1 - p. 591-596 , 2013
Link:
https://doi.org/10.1149/05201.0591ecst
RT Journal T1
(Invited) Performance Analysis of a Novel Slurry Injection System for Oxide Chemical Mechanical Planarization
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_05201.0591ecst&Exemplar=1&LAN=DE A1 Borucki, Leonard A1 Zhuang, Yun A1 Sampurno, Yasa A1 Philipossian, Ara A1 Kreutzer-Schneeweiss, Sascha PB The Electrochemical Society YR 2013 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 52 IS 1 SP 591 OP 596 LK http://dx.doi.org/https://doi.org/10.1149/05201.0591ecst DO https://doi.org/10.1149/05201.0591ecst SF ELIB - SuUB Bremen
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