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1 Ergebnisse
1
Optimization of M1 to Contact Connection in Sub-40nm Node:
Zhang, Liang
;
Fang, Jingxun
;
Mao, Zhibiao
...
ECS Transactions. 52 (2013) 1 - p. 625-633 , 2013
Link:
https://doi.org/10.1149/05201.0625ecst
RT Journal T1
Optimization of M1 to Contact Connection in Sub-40nm Node
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_05201.0625ecst&Exemplar=1&LAN=DE A1 Zhang, Liang A1 Fang, Jingxun A1 Mao, Zhibiao A1 Huang, Hai A1 Li, Fang A1 Yan, Junhua A1 Yu, Shirui A1 Huang, Jun A1 Zhao, Long A1 Zhang, Huijun A1 Chen, Fei A1 Leng, Jianghua A1 Zhu, Y. F. A1 Jing, Xubin A1 Yu, Liujiang A1 Zhang, Yu A1 Cao, Yongfeng A1 Pang, Albert PB The Electrochemical Society YR 2013 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 52 IS 1 SP 625 OP 633 LK http://dx.doi.org/https://doi.org/10.1149/05201.0625ecst DO https://doi.org/10.1149/05201.0625ecst SF ELIB - SuUB Bremen
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