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1 Ergebnisse
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Effects of Plasma and Wet Processes on Si-Rich Anti-Reflect..:
Pollet, Olivier
;
Sommer, Romain
;
Lachal, Laurent
...
ECS Transactions. 58 (2013) 6 - p. 241-249 , 2013
Link:
https://doi.org/10.1149/05806.0241ecst
RT Journal T1
Effects of Plasma and Wet Processes on Si-Rich Anti-Reflective Coating to Address Selective Trilayer Rework for Sub-20nm Technology Nodes
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_05806.0241ecst&Exemplar=1&LAN=DE A1 Pollet, Olivier A1 Sommer, Romain A1 Lachal, Laurent A1 Barnola, Sebastien A1 De Buttet, Come A1 Richard, Claire A1 Jenny, Cecile PB The Electrochemical Society YR 2013 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 58 IS 6 SP 241 OP 249 LK http://dx.doi.org/https://doi.org/10.1149/05806.0241ecst DO https://doi.org/10.1149/05806.0241ecst SF ELIB - SuUB Bremen
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