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1 Ergebnisse
1
Endpoint Detection for Single Layer Plasma Etch Using Hybri..:
Shin, Sung-Hwan
;
Noh, Ho-Taek
;
Kim, Dong-Ill
..
ECS Transactions. 60 (2014) 1 - p. 875-880 , 2014
Link:
https://doi.org/10.1149/06001.0875ecst
RT Journal T1
Endpoint Detection for Single Layer Plasma Etch Using Hybrid Fuzzy Inference Systems
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_06001.0875ecst&Exemplar=1&LAN=DE A1 Shin, Sung-Hwan A1 Noh, Ho-Taek A1 Kim, Dong-Ill A1 Park, Young-Kook A1 Han, Seung-Soo PB The Electrochemical Society YR 2014 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 60 IS 1 SP 875 OP 880 LK http://dx.doi.org/https://doi.org/10.1149/06001.0875ecst DO https://doi.org/10.1149/06001.0875ecst SF ELIB - SuUB Bremen
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