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1 Ergebnisse
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(Invited) SOI-Type Bonded Structures for Advanced Technolog..:
Widiez, Julie
;
Hartmann, Jean-Michel
;
Mazen, Frédéric
...
ECS Transactions. 64 (2014) 5 - p. 35-48 , 2014
Link:
https://doi.org/10.1149/06405.0035ecst
RT Journal T1
(Invited) SOI-Type Bonded Structures for Advanced Technology Nodes
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_06405.0035ecst&Exemplar=1&LAN=DE A1 Widiez, Julie A1 Hartmann, Jean-Michel A1 Mazen, Frédéric A1 Sollier, Sébastien A1 Veytizou, Christelle A1 Bogumilowicz, Yann A1 Augendre, Emmanuel A1 Martin, Mickael A1 Gonzatti, Frédéric A1 Roure, Marie-Christine A1 Duvernay, Julien A1 Loup, Virginie A1 Euvrard-Colnat, Catherine A1 Seignard, Aurélien A1 Baron, Thierry A1 Cipro, Romain A1 Bassani, Franck A1 Papon, Anne-Marie A1 Guedj, Cyril A1 Huyet, Isabelle A1 Rivoire, Maurice A1 Besson, Pascal A1 Figuet, Christophe A1 Schwarzenbach, Walter A1 Delprat, Daniel A1 Signamarcheix, Thomas PB The Electrochemical Society YR 2014 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 64 IS 5 SP 35 OP 48 LK http://dx.doi.org/https://doi.org/10.1149/06405.0035ecst DO https://doi.org/10.1149/06405.0035ecst SF ELIB - SuUB Bremen
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