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1 Ergebnisse
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Liquid Phase Epitaxy (LPE) Formation of Localized High Qual..:
Borland, John O
;
Sugitani, Michiro
;
Oesterlin, Peter
...
ECS Transactions. 64 (2014) 6 - p. 127-145 , 2014
Link:
https://doi.org/10.1149/06406.0127ecst
RT Journal T1
Liquid Phase Epitaxy (LPE) Formation of Localized High Quality and Mobility Ge & SiGe by High Dose Ge-Implantation with Laser Melt Annealing for 10nm and 7nm Node CMOS Technology
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_06406.0127ecst&Exemplar=1&LAN=DE A1 Borland, John O A1 Sugitani, Michiro A1 Oesterlin, Peter A1 Johnson, Walt A1 Buyuklimanli, Temel A1 Hengstebeck, Robert A1 Kennon, Ethan A1 Jones, Kevin Scott A1 Joshi, Abhijeet PB The Electrochemical Society YR 2014 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 64 IS 6 SP 127 OP 145 LK http://dx.doi.org/https://doi.org/10.1149/06406.0127ecst DO https://doi.org/10.1149/06406.0127ecst SF ELIB - SuUB Bremen
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