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1 Ergebnisse
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Grown‐in Oxide Precipitate Nuclei in Czochralski Silicon Su..:
Kissinger, G.
;
Grabolla, T.
;
Morgenstern, G.
...
Journal of The Electrochemical Society. 146 (1999) 5 - p. 1971-1976 , 1999
Link:
https://doi.org/10.1149/1.1391875
RT Journal T1 <Title>Grown‐in Oxide Precipitate Nuclei in Czochralski Silicon Substrates and Their Role in Device Processing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.1391875&Exemplar=1&LAN=DE A1 Kissinger, G. A1 Grabolla, T. A1 Morgenstern, G. A1 Richter, H. A1 Gräf, D. A1 Vanhellemont, J. A1 Lambert, U. A1 von Ammon, W. PB The Electrochemical Society YR 1999 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 146 IS 5 SP 1971 OP 1976 LK http://dx.doi.org/https://doi.org/10.1149/1.1391875 DO https://doi.org/10.1149/1.1391875 SF ELIB - SuUB Bremen
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