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1 Ergebnisse
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Dry Etching of BaSrTiO3 and LaNiO3 Thin Films in Inductivel..:
Lee, K. P.
;
Jung, K. B.
;
Srivastava, A.
...
Journal of The Electrochemical Society. 146 (1999) 10 - p. 3778-3782 , 1999
Link:
https://doi.org/10.1149/1.1392549
RT Journal T1 <Title>Dry Etching of BaSrTiO3 and LaNiO3 Thin Films in Inductively Coupled Plasmas</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.1392549&Exemplar=1&LAN=DE A1 Lee, K. P. A1 Jung, K. B. A1 Srivastava, A. A1 Kumar, D. A1 Singh, R. K. A1 Pearton, S. J. PB The Electrochemical Society YR 1999 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 146 IS 10 SP 3778 OP 3782 LK http://dx.doi.org/https://doi.org/10.1149/1.1392549 DO https://doi.org/10.1149/1.1392549 SF ELIB - SuUB Bremen
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