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1 Ergebnisse
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Unintentional Doping of Wafers Due to Organophosphates in t..:
Lebens, J. A.
;
McColgin, W. C.
;
Russell, J. B.
..
Journal of The Electrochemical Society. 143 (1996) 9 - p. 2906-2909 , 1996
Link:
https://doi.org/10.1149/1.1837125
RT Journal T1 <Title>Unintentional Doping of Wafers Due to Organophosphates in the Clean Room Ambient</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.1837125&Exemplar=1&LAN=DE A1 Lebens, J. A. A1 McColgin, W. C. A1 Russell, J. B. A1 Mori, E. J. A1 Shive, L. W. PB The Electrochemical Society YR 1996 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 143 IS 9 SP 2906 OP 2909 LK http://dx.doi.org/https://doi.org/10.1149/1.1837125 DO https://doi.org/10.1149/1.1837125 SF ELIB - SuUB Bremen
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