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1 Ergebnisse
1
Electrochemical Impedance Spectroscopy of Copper Deposition..:
Cheng, X.
;
Li, G.
;
Kneer, E. A.
...
Journal of The Electrochemical Society. 145 (1998) 1 - p. 352-357 , 1998
Link:
https://doi.org/10.1149/1.1838259
RT Journal T1 <Title>Electrochemical Impedance Spectroscopy of Copper Deposition on Silicon from Dilute Hydrofluoric Acid Solutions</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.1838259&Exemplar=1&LAN=DE A1 Cheng, X. A1 Li, G. A1 Kneer, E. A. A1 Vermeire, B. A1 Parks, H. G. A1 Raghavan, S. A1 Jeon, J. S. PB The Electrochemical Society YR 1998 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 145 IS 1 SP 352 OP 357 LK http://dx.doi.org/https://doi.org/10.1149/1.1838259 DO https://doi.org/10.1149/1.1838259 SF ELIB - SuUB Bremen
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