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1 Ergebnisse
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Optimization of Polysilicon Encapsulated Local Oxidation of..:
Badenes, Gonçal
;
Rooyackers, Rita
;
Jones, Stephen K.
...
Journal of The Electrochemical Society. 145 (1998) 5 - p. 1653-1659 , 1998
Link:
https://doi.org/10.1149/1.1838532
RT Journal T1 <Title>Optimization of Polysilicon Encapsulated Local Oxidation of Silicon: Cavity Dimension Effects on Mechanical Stress and Gate Oxide Integrity</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.1838532&Exemplar=1&LAN=DE A1 Badenes, Gonçal A1 Rooyackers, Rita A1 Jones, Stephen K. A1 Bazley, Dave A1 Beanland, Richard A1 De Wolf, Ingrid A1 Deferm, Ludo PB The Electrochemical Society YR 1998 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 145 IS 5 SP 1653 OP 1659 LK http://dx.doi.org/https://doi.org/10.1149/1.1838532 DO https://doi.org/10.1149/1.1838532 SF ELIB - SuUB Bremen
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