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Fabrication of HfO[sub 2] Thin-Film Capacitors with a Polyc..:

Lee, Suk Woo ; Hong, Sug Hun ; Park, Jaehoo...
Electrochemical and Solid-State Letters.  8 (2005)  9 - p. F32 , 2005
Link: https://doi.org/10.1149/1.1993387