I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
A Less Critical Cleaning Procedure for Silicon Wafer Using ..:
Filho, Sebastião Gomes dos Santos
;
Hasenack, Claus Martin
;
Salay, Luiz Carlos
.
Journal of The Electrochemical Society. 142 (1995) 3 - p. 902-907 , 1995
Link:
https://doi.org/10.1149/1.2048555
RT Journal T1
A Less Critical Cleaning Procedure for Silicon Wafer Using Diluted HF Dip and Boiling in Isopropyl Alcohol as Final Steps
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2048555&Exemplar=1&LAN=DE A1 Filho, Sebastião Gomes dos Santos A1 Hasenack, Claus Martin A1 Salay, Luiz Carlos A1 Mertens, Paul PB The Electrochemical Society YR 1995 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 142 IS 3 SP 902 OP 907 LK http://dx.doi.org/https://doi.org/10.1149/1.2048555 DO https://doi.org/10.1149/1.2048555 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)