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Mechanism of (111) Silicon Etching in HF ‐ Acetonitrile:
Rieger, Melissa M.
;
Kohl, Paul A.
Journal of The Electrochemical Society. 142 (1995) 5 - p. 1490-1495 , 1995
Link:
https://doi.org/10.1149/1.2048602
RT Journal T1 <Title>Mechanism of (111) Silicon Etching in HF ‐ Acetonitrile</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2048602&Exemplar=1&LAN=DE A1 Rieger, Melissa M. A1 Kohl, Paul A. PB The Electrochemical Society YR 1995 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 142 IS 5 SP 1490 OP 1495 LK http://dx.doi.org/https://doi.org/10.1149/1.2048602 DO https://doi.org/10.1149/1.2048602 SF ELIB - SuUB Bremen
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