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Wet Chemical Etching with Lactic Acid Solutions for InP ‐ b..:
Ikossi‐Anastasiou, K.
;
Binari, S. C.
;
Kelner, G.
...
Journal of The Electrochemical Society. 142 (1995) 10 - p. 3558-3564 , 1995
Link:
https://doi.org/10.1149/1.2050022
RT Journal T1 <Title>Wet Chemical Etching with Lactic Acid Solutions for InP ‐ based Semiconductor Devices</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2050022&Exemplar=1&LAN=DE A1 Ikossi‐Anastasiou, K. A1 Binari, S. C. A1 Kelner, G. A1 Boos, J. B. A1 Kyono, C. S. A1 Mittereder, J. A1 Griffin, G. L. PB The Electrochemical Society YR 1995 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 142 IS 10 SP 3558 OP 3564 LK http://dx.doi.org/https://doi.org/10.1149/1.2050022 DO https://doi.org/10.1149/1.2050022 SF ELIB - SuUB Bremen
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