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Wavelength Considerations for Improved Silicon Wafer Temper..:
Sampson, R. K.
;
Conrad, K. A.
;
Massoud, H. Z.
.
Journal of The Electrochemical Society. 141 (1994) 2 - p. 539-542 , 1994
Link:
https://doi.org/10.1149/1.2054762
RT Journal T1 <Title>Wavelength Considerations for Improved Silicon Wafer Temperature Measurement by Ellipsometry</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2054762&Exemplar=1&LAN=DE A1 Sampson, R. K. A1 Conrad, K. A. A1 Massoud, H. Z. A1 Irene, E. A. PB The Electrochemical Society YR 1994 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 141 IS 2 SP 539 OP 542 LK http://dx.doi.org/https://doi.org/10.1149/1.2054762 DO https://doi.org/10.1149/1.2054762 SF ELIB - SuUB Bremen
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