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Optimization of Anodic Silicon Oxide Films for Low Temperat..:
Mende, G.
;
Flietner, H.
;
Deutscher, M.
Journal of The Electrochemical Society. 140 (1993) 1 - p. 188-194 , 1993
Link:
https://doi.org/10.1149/1.2056083
RT Journal T1 <Title>Optimization of Anodic Silicon Oxide Films for Low Temperature Passivation of Silicon Surfaces</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2056083&Exemplar=1&LAN=DE A1 Mende, G. A1 Flietner, H. A1 Deutscher, M. PB The Electrochemical Society YR 1993 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 140 IS 1 SP 188 OP 194 LK http://dx.doi.org/https://doi.org/10.1149/1.2056083 DO https://doi.org/10.1149/1.2056083 SF ELIB - SuUB Bremen
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