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1 Ergebnisse
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Chemically Amplified Resist Using Self‐Solubility Accelerat..:
Kihara, Naoko
;
Ushirogouchi, Tohru
;
Tada, Tsukasa
...
Journal of The Electrochemical Society. 141 (1994) 11 - p. 3162-3166 , 1994
Link:
https://doi.org/10.1149/1.2059295
RT Journal T1 <Title>Chemically Amplified Resist Using Self‐Solubility Acceleration Effect</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2059295&Exemplar=1&LAN=DE A1 Kihara, Naoko A1 Ushirogouchi, Tohru A1 Tada, Tsukasa A1 Naito, Takuya A1 Saito, Satoshi A1 Nakase, Makoto PB The Electrochemical Society YR 1994 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 141 IS 11 SP 3162 OP 3166 LK http://dx.doi.org/https://doi.org/10.1149/1.2059295 DO https://doi.org/10.1149/1.2059295 SF ELIB - SuUB Bremen
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