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1 Ergebnisse
1
Acceptor Compensation in Silicon Induced by Chemomechanical..:
Prigge, Helene
;
Gerlach, Peter
;
Hahn, Peter O.
..
Journal of The Electrochemical Society. 138 (1991) 5 - p. 1385-1389 , 1991
Link:
https://doi.org/10.1149/1.2085791
RT Journal T1 <Title>Acceptor Compensation in Silicon Induced by Chemomechanical Polishing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2085791&Exemplar=1&LAN=DE A1 Prigge, Helene A1 Gerlach, Peter A1 Hahn, Peter O. A1 Schnegg, Anton A1 Jacob, Herbert PB The Electrochemical Society YR 1991 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 138 IS 5 SP 1385 OP 1389 LK http://dx.doi.org/https://doi.org/10.1149/1.2085791 DO https://doi.org/10.1149/1.2085791 SF ELIB - SuUB Bremen
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