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Assessment of the Surface Quality of SIMOX Wafers by UV Ref..:
Harbeke, G.
;
Jastrzebski, L.
Journal of The Electrochemical Society. 137 (1990) 2 - p. 696-699 , 1990
Link:
https://doi.org/10.1149/1.2086534
RT Journal T1 <Title>Assessment of the Surface Quality of SIMOX Wafers by UV Reflectance</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2086534&Exemplar=1&LAN=DE A1 Harbeke, G. A1 Jastrzebski, L. PB The Electrochemical Society YR 1990 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 137 IS 2 SP 696 OP 699 LK http://dx.doi.org/https://doi.org/10.1149/1.2086534 DO https://doi.org/10.1149/1.2086534 SF ELIB - SuUB Bremen
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