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1 Ergebnisse
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A Refined Polycide Gate Process with Silicided Diffusions f..:
Norström, H.
;
Nygren, S.
;
Johansson, T.
...
Journal of The Electrochemical Society. 136 (2019) 3 - p. 805-809 , 2019
Link:
https://doi.org/10.1149/1.2096747
RT Journal T1 <Title>A Refined Polycide Gate Process with Silicided Diffusions for Submicron MOS Applications</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2096747&Exemplar=1&LAN=DE A1 Norström, H. A1 Nygren, S. A1 Johansson, T. A1 Buchta, R. A1 Östling, M. A1 Lindberg, A. A1 Gustafsson, U. A1 Petersson, C. A. PB The Electrochemical Society YR 2019 SN 1945-7111 JF Journal of The Electrochemical Society VO 136 IS 3 SP 805 OP 809 LK http://dx.doi.org/https://doi.org/10.1149/1.2096747 DO https://doi.org/10.1149/1.2096747 SF ELIB - SuUB Bremen
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