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1 Ergebnisse
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Selective Oxidation Using Ultrathin Nitrogen‐Rich Silicon S..:
Paz de Araujo, C. A.
;
Huang, Y. P.
;
Gallegos, R.
Journal of The Electrochemical Society. 136 (1989) 7 - p. 2035-2038 , 1989
Link:
https://doi.org/10.1149/1.2097151
RT Journal T1 <Title>Selective Oxidation Using Ultrathin Nitrogen‐Rich Silicon Surface Layers Grown by Rapid Thermal Processing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2097151&Exemplar=1&LAN=DE A1 Paz de Araujo, C. A. A1 Huang, Y. P. A1 Gallegos, R. PB The Electrochemical Society YR 1989 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 136 IS 7 SP 2035 OP 2038 LK http://dx.doi.org/https://doi.org/10.1149/1.2097151 DO https://doi.org/10.1149/1.2097151 SF ELIB - SuUB Bremen
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