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Electrical Properties of Silicon Dioxide Films Fabricated a..:
Trombetta, L. P.
;
Zeto, R. J.
;
Feigl, F. J.
.
Journal of The Electrochemical Society. 132 (1985) 11 - p. 2706-2713 , 1985
Link:
https://doi.org/10.1149/1.2113651
RT Journal T1 <Title>Electrical Properties of Silicon Dioxide Films Fabricated at 700°C: III . High Pressure Thermal Oxidation</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2113651&Exemplar=1&LAN=DE A1 Trombetta, L. P. A1 Zeto, R. J. A1 Feigl, F. J. A1 Zvanut, M. E. PB The Electrochemical Society YR 1985 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 132 IS 11 SP 2706 OP 2713 LK http://dx.doi.org/https://doi.org/10.1149/1.2113651 DO https://doi.org/10.1149/1.2113651 SF ELIB - SuUB Bremen
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