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Growth and Physical Properties of LPCVD Polycrystalline Sil..:
Harbeke, G.
;
Krausbauer, L.
;
Steigmeier, E. F.
...
Journal of The Electrochemical Society. 131 (1984) 3 - p. 675-682 , 1984
Link:
https://doi.org/10.1149/1.2115672
RT Journal T1 <Title>Growth and Physical Properties of LPCVD Polycrystalline Silicon Films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2115672&Exemplar=1&LAN=DE A1 Harbeke, G. A1 Krausbauer, L. A1 Steigmeier, E. F. A1 Widmer, A. E. A1 Kappert, H. F. A1 Neugebauer, G. PB The Electrochemical Society YR 1984 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 131 IS 3 SP 675 OP 682 LK http://dx.doi.org/https://doi.org/10.1149/1.2115672 DO https://doi.org/10.1149/1.2115672 SF ELIB - SuUB Bremen
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