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Structural Perfection Testing of Films and Wafers by Means ..:
Steigmeier, E. F.
;
Auderset, H.
Journal of The Electrochemical Society. 131 (1984) 7 - p. 1693-1699 , 1984
Link:
https://doi.org/10.1149/1.2115940
RT Journal T1 <Title>Structural Perfection Testing of Films and Wafers by Means of Optical Scanner</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2115940&Exemplar=1&LAN=DE A1 Steigmeier, E. F. A1 Auderset, H. PB The Electrochemical Society YR 1984 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 131 IS 7 SP 1693 OP 1699 LK http://dx.doi.org/https://doi.org/10.1149/1.2115940 DO https://doi.org/10.1149/1.2115940 SF ELIB - SuUB Bremen
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