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Practical Considerations in the Implementation of Same‐Leve..:
Berker, T. D.
Journal of The Electrochemical Society. 130 (1983) 2 - p. 474-478 , 1983
Link:
https://doi.org/10.1149/1.2119734
RT Journal T1 <Title>Practical Considerations in the Implementation of Same‐Level Mixed Lithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2119734&Exemplar=1&LAN=DE A1 Berker, T. D. PB The Electrochemical Society YR 1983 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 130 IS 2 SP 474 OP 478 LK http://dx.doi.org/https://doi.org/10.1149/1.2119734 DO https://doi.org/10.1149/1.2119734 SF ELIB - SuUB Bremen
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