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1 Ergebnisse
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Implantation Gettering of Gold in Silicon:
Lo, M. J. T.
;
Skalnik, J. G.
;
Ordung, P. F.
Journal of The Electrochemical Society. 128 (1981) 7 - p. 1569-1573 , 1981
Link:
https://doi.org/10.1149/1.2127684
RT Journal T1 <Title>Implantation Gettering of Gold in Silicon</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2127684&Exemplar=1&LAN=DE A1 Lo, M. J. T. A1 Skalnik, J. G. A1 Ordung, P. F. PB The Electrochemical Society YR 1981 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 128 IS 7 SP 1569 OP 1573 LK http://dx.doi.org/https://doi.org/10.1149/1.2127684 DO https://doi.org/10.1149/1.2127684 SF ELIB - SuUB Bremen
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