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Comment on "Phosphorus‐Doped Polycrystalline Silicon via LP..:
Learn, A.
Journal of The Electrochemical Society. 132 (1985) 5 - p. 1257-1258 , 1985
Link:
https://doi.org/10.1149/1.2148686
RT Journal T1 <Title>Comment on "Phosphorus‐Doped Polycrystalline Silicon via LPCVD" [J. Electrochem. Soc., 131, 2361]: I . Process Characterization</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2148686&Exemplar=1&LAN=DE A1 Learn, A. PB The Electrochemical Society YR 1985 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 132 IS 5 SP 1257 OP 1258 LK http://dx.doi.org/https://doi.org/10.1149/1.2148686 DO https://doi.org/10.1149/1.2148686 SF ELIB - SuUB Bremen
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