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Stability of Diborane Mixtures Used for Borophosphosilicate..:
Flaherty, Edward T.
;
Marshall, Jeff
;
Albert, Pamela
...
Journal of The Electrochemical Society. 140 (1993) 6 - p. 1709-1713 , 1993
Link:
https://doi.org/10.1149/1.2221628
RT Journal T1 <Title>Stability of Diborane Mixtures Used for Borophosphosilicate Glass Films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2221628&Exemplar=1&LAN=DE A1 Flaherty, Edward T. A1 Marshall, Jeff A1 Albert, Pamela A1 Brzychcy, Ann Marie A1 Forbes, Delya A1 Halverson, Robert PB The Electrochemical Society YR 1993 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 140 IS 6 SP 1709 OP 1713 LK http://dx.doi.org/https://doi.org/10.1149/1.2221628 DO https://doi.org/10.1149/1.2221628 SF ELIB - SuUB Bremen
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